Open AccessAtomically Controlled Plasma Processing for Quantum Heterointegration of Group IV Semiconductors
Author(s) -
Masao Sakuraba,
Junichi Murota
Publication year - 2011
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-02/32/2152
Subject(s) - group (periodic table) , plasma , semiconductor , materials science , physics , optoelectronics , quantum mechanics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom