Open AccessEvaluation Model of Neutral Particles Behavior Influence upon Contact Profile in C4F8-Based Dry Etch
Author(s) -
Alexander Chamov,
Alexey Korovkin,
Andrey Krasnikov,
Sergey Yanovich
Publication year - 2011
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-01/25/1506
Subject(s) - materials science
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