Open AccessHigh Power Density UV Optical Stress for Quality Evaluation of 4H-SiC Epitaxial Layers
Author(s) -
Andrea Canino,
Massimo Camarda,
Francesco La Via
Publication year - 2011
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-01/24/1478
Subject(s) - epitaxy , materials science , optoelectronics , stress (linguistics) , power (physics) , power density , quality (philosophy) , engineering physics , composite material , physics , layer (electronics) , linguistics , philosophy , quantum mechanics
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