Open AccessVT Stability of HK/MG Stacks with Device Scaling in 30nm Technology
Author(s) -
X. Garros,
Laurent Brunet,
M. Cassé,
O. Weber,
F. Andrieu,
D. Lafond,
C. Gaumer,
G. Reimbold,
F. Boulanger
Publication year - 2011
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-01/22/1392
Subject(s) - scaling , stability (learning theory) , materials science , engineering physics , electrical engineering , computer science , physics , engineering , mathematics , geometry , machine learning
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