Open AccessMicromachining of Si Using Anodized Needle Electrodes in HF Solution
Author(s) -
Tomohiko Sugita,
Kazuki Hiramatsu,
Shigeru Ikeda,
Michio Matsumura
Publication year - 2011
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-01/16/1151
Subject(s) - anodizing , surface micromachining , materials science , electrode , metallurgy , chemistry , aluminium , fabrication , medicine , alternative medicine , pathology
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