Open AccessBaCe0.8Zr0.1Y0.1O3 Thin Film Deposited by Reactive Magnetron Sputtering
Author(s) -
Mohammad Arab Pour Yazdi,
Pascal Briois,
Alain Billard
Publication year - 2011
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-01/12/780
Subject(s) - materials science , thin film , cavity magnetron , sputter deposition , sputtering , optoelectronics , chemical engineering , nanotechnology , engineering
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