Open AccessPVA Brush Technology for Next Generation Post-CMP Cleaning Applications
Author(s) -
Rakesh Kumar Singh,
Chintan Patel,
David Trio,
Eric McNamara,
Christopher Wargo
Publication year - 2010
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2010-02/21/1480
Subject(s) - brush , computer science , process engineering , materials science , engineering , composite material
not Available.
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