Open AccessSorbate as a Passivator in Copper CMP Slurries
Author(s) -
Yair EinEli
Publication year - 2010
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2010-02/21/1463
Subject(s) - slurry , copper , materials science , environmental chemistry , environmental science , chemistry , metallurgy , composite material
not Available.
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