Open AccessRecent Advances in Ultra Low Erosion Cu CMP Process Development
Author(s) -
Lee M. Cook,
Mahadavaier Krishnan,
John Nguyen,
Michael Lofaro,
John Thompson,
Dinesh Koli
Publication year - 2010
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2010-02/21/1456
Subject(s) - erosion , process development , materials science , environmental science , metallurgy , engineering , process engineering , geology , geomorphology
not Available.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom