Open AccessHot Wire Chemical Vapor Deposition of Ge2Sb2Te5 Thin Films
Author(s) -
Denis Reso,
Mindaugas Šilinskas,
Bodo Kalkofen,
Marco Lisker,
Edmund P. Burte
Publication year - 2010
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2010-01/21/1133
Subject(s) - chemical vapor deposition , materials science , combustion chemical vapor deposition , thin film , chemical engineering , nanotechnology , optoelectronics , carbon film , engineering
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