Open AccessImpact of Small Deviations in EEDF on Silane-based Plasma Chemistry
Author(s) -
Alexey Y. Kovalgin,
A. Boogaard,
R.A.M. Wolters
Publication year - 2009
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2009-02/34/2549
Subject(s) - silane , plasma , chemistry , nanotechnology , engineering physics , environmental science , materials science , engineering , physics , nuclear physics , organic chemistry
not Available.
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