Open AccessIn Situ Studies of Pd/Ge Layers for Ohmic Contact on GaAs and InGaAs
Author(s) -
Andrea Firrincieli,
Eddy Simoen,
Marc Meuris,
Cor Claeys,
Karl Opsomer,
Christophe Detavernier,
Roland Van Meirhaeghe
Publication year - 2009
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2009-01/1/37
Subject(s) - ohmic contact , in situ , materials science , optoelectronics , germanium , nanotechnology , engineering physics , chemistry , engineering , layer (electronics) , silicon , organic chemistry
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