Open AccessIn-situ Surface Recombination Measurement of Oxygen and Chlorine Atoms on Dynamic Stainless Steel Surfaces in Inductively Coupled O2 and Cl2 Plasmas
Author(s) -
Luc Stafford,
Joydeep Guha,
Vincent M. Donnelly
Publication year - 2008
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2008-01/19/743
Subject(s) - in situ , plasma , inductively coupled plasma , materials science , recombination , chlorine , oxygen , analytical chemistry (journal) , atomic physics , metallurgy , chemistry , environmental chemistry , physics , nuclear physics , organic chemistry , biochemistry , gene
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