Open AccessCharacterization of Phosphate Electrolytes for use in Cu Electrochemical Mechanical Planarization
Author(s) -
Kristin G. Shattuck,
JengYu Lin,
Alan C. West
Publication year - 2008
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2008-01/17/685
Subject(s) - chemical mechanical planarization , characterization (materials science) , electrolyte , electrochemistry , phosphate , materials science , nanotechnology , chemistry , electrode , polishing , metallurgy , organic chemistry
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