Open AccessParticle Adhesion to Photomask Substrates
Author(s) -
Ravi P. Jaiswal,
Caitlin Kilroy,
Gautam Kumar,
Souvik Banerjee,
Stephen P. Beaudoin
Publication year - 2007
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2007-02/18/1069
Subject(s) - photomask , particle (ecology) , adhesion , nanotechnology , materials science , composite material , geology , oceanography , layer (electronics) , resist
not Available.
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