Open AccessMEMS Capacitive Switch Fabrication using Photodefinable Metal Oxide Dielectrics
Author(s) -
Clifford L. Henderson,
Michael Romeo,
Guoan Wang,
John Papapolymerou
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2006-02/49/2148
Subject(s) - fabrication , microelectromechanical systems , capacitive sensing , materials science , dielectric , oxide , optoelectronics , capacitance , metal , electrical engineering , nanotechnology , engineering , metallurgy , electrode , chemistry , medicine , alternative medicine , pathology
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