Open AccessOptical Properties of AlTiO Films Grown by PEALD
Author(s) -
Lim Jungwook,
Sun-Jin Yun,
Hyun-Tak Kim
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2006-02/21/1080
Subject(s) - materials science
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