Open AccessDrivability Enhancement of MOS Transistors Fabricated on Nano-Grating Silicon Wafers
Author(s) -
Takashi Ito,
Shin-Ichiro Kuroki,
Koji Kotani
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2006-01/7/360
Subject(s) - materials science , wafer , nano , optoelectronics , transistor , grating , silicon , nanotechnology , electrical engineering , engineering , voltage , composite material
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