Open AccessElectrochemical Characterization of Copper Electropolishing in Phosphoric Acid
Author(s) -
Julie Knoll,
Uziel Landau,
Rohan Akolkar,
Tatyana A. Andryushchenko,
Anne Miller
Publication year - 2006
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2006-01/10/477
Subject(s) - electropolishing , phosphoric acid , copper , electrochemistry , characterization (materials science) , metallurgy , materials science , inorganic chemistry , chemistry , nanotechnology , electrode , electrolyte
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