Open AccessAl/La2O3 analysis of Post Metallization Annealed MISFET by XPS
Author(s) -
Yusuke Kuroki,
Jin Aun Ng,
Kuniyuki Kakushima
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-02/13/513
Subject(s) - misfet , x ray photoelectron spectroscopy , materials science , chemical engineering , electrical engineering , engineering , transistor , voltage , field effect transistor
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