Open AccessPore Sealing for Low-k Delectric Integration into Integrated Circuits
Author(s) -
Timothy S. Cale,
Christopher Jezewski,
Dae-Lok Bae,
Jay J. Senkevich
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/9/435
Subject(s) - integrated circuit , materials science , computer science , nanotechnology , optoelectronics
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