Open AccessPreparation and Electrical Properties of Pb(Zr0.9Ti0.1)O3/Pb(Zr0.1Ti0.9)O3 Multilayer Thin Films by Dual-gun RF Magnetron Sputtering
Author(s) -
Su-Jien Lin,
Chia-Han Lai,
S. S. Lin,
Shou-Yi Chang
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/8/385
Subject(s) - materials science , high power impulse magnetron sputtering , sputter deposition , sputtering , optoelectronics , dual (grammatical number) , cavity magnetron , thin film , nanotechnology , literature , art
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