Open AccessElectroless Deposition of Nano-Sized Films for Fabrication of Photomasks, ULSI, Piezodevices
Author(s) -
Teimuraz Khoperia,
Laura Maisurdze,
Miriam Berberashvili,
Vladimir Chikhradze
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/7/338
Subject(s) - photomask , fabrication , nano , deposition (geology) , materials science , nanotechnology , composite material , resist , geology , layer (electronics) , medicine , paleontology , alternative medicine , pathology , sediment
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