Open AccessNanopatterning with an AFM Through Insulating Layers on Silicon
Author(s) -
Yan Zhang,
Eugeniu Balaur,
Patrik Schmuki
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/5/296
Subject(s) - atomic force microscopy , materials science , silicon , nanotechnology , optoelectronics , engineering physics , composite material , engineering
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