Open AccessMiniature Multi-Channel High-sensitivity Implantable MEMS Pressure Sensor and CMOS Readout System
Author(s) -
Zhiyu Hu,
Decheng Yi,
Nazmul Islam,
Mohammad Aftab Alam,
Syed K. Islam,
Arnab Choudhury,
Thomas Thundat
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/45/1752
Subject(s) - sensitivity (control systems) , cmos , microelectromechanical systems , pressure sensor , channel (broadcasting) , electrical engineering , materials science , electronic engineering , optoelectronics , engineering , mechanical engineering
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