Open AccessSi:C Epitaxial Wafer for Improved Sub-100nm CMOS Transistor Performance
Author(s) -
Robert Standley,
Majid Mansoori,
D. Miles,
Srini Chakravarthi,
Mike Seacrist,
R. Wise,
Tom Torack,
Mike Ries
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/14/656
Subject(s) - wafer , cmos , materials science , optoelectronics , transistor , epitaxy , electronic engineering , electrical engineering , nanotechnology , engineering , voltage , layer (electronics)
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