Open AccessDistortion of Silicon-on-Insulator Wafers During CMOS Processing
Author(s) -
Paul Riley,
Terry Manchester,
Boon-Yong Ang,
Jack Ward Thomas
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/12/545
Subject(s) - wafer , silicon on insulator , cmos , materials science , distortion (music) , optoelectronics , electronic engineering , insulator (electricity) , silicon , electrical engineering , engineering , amplifier
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