Open AccessSurface Micromachining
Author(s) -
Bernd Loechel
Publication year - 1995
Publication title -
the electrochemical society interface
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.568
H-Index - 46
eISSN - 1944-8783
pISSN - 1064-8208
DOI - 10.1149/2.f08953if
Subject(s) - surface micromachining , fabrication , cost reduction , nanotechnology , reduction (mathematics) , materials science , manufacturing engineering , engineering , business , medicine , alternative medicine , geometry , mathematics , pathology , marketing
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