Silicon-Based Ultrathin Dielectrics | Zendy

Randhir Thakur | Zendy; Yuanning Chen | Zendy; Edward H. Poindexter | Zendy; Rajendra Singh | Zendy

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Silicon-Based Ultrathin Dielectrics

Author(s) -

Randhir Thakur,

Yuanning Chen,

Edward H. Poindexter,

Rajendra Singh

Publication year - 1999

Publication title -

the electrochemical society interface

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.568

H-Index - 46

eISSN - 1944-8783

pISSN - 1064-8208

DOI - 10.1149/2.f05992if

Subject(s) - silicon , electronics , cmos , materials science , transistor , integrated circuit , field effect transistor , engineering physics , semiconductor , electronic circuit , semiconductor industry , nanotechnology , electrical engineering , optoelectronics , engineering , manufacturing engineering , voltage

The phenomenal sustained growth of the electronics industry in the last three decades is primarily due to the success of silicon integrated circuit technology. As compared to any other technology, complementary metal-oxide silicon (CMOS) transistor based integrated circuits have dominated the field of semiconductor manufacturing.

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