Open AccessChemical Vapor Deposition in the 21st Century
Author(s) -
Karl E. Spear,
JanOtto Carlsson
Publication year - 1993
Publication title -
the electrochemical society interface
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.568
H-Index - 46
eISSN - 1944-8783
pISSN - 1064-8208
DOI - 10.1149/2.f04932if
Subject(s) - deposition (geology) , chemical vapor deposition , current (fluid) , materials science , nanotechnology , engineering physics , environmental science , environmental chemistry , chemistry , engineering , electrical engineering , geology , paleontology , sediment
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