Open AccessHigh Power and High Capacity 3D-Structured TiO2Electrodes for Lithium-Ion Microbatteries
Author(s) -
Jie Xie,
Jos Oudenhoven,
Dongjiang Li,
Chunguang Chen,
RüdigerA. Eichel,
Peter H. L. Notten
Publication year - 2016
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/2.1141610jes
Subject(s) - electrode , materials science , chemical vapor deposition , lithium (medication) , optoelectronics , reactive ion etching , etching (microfabrication) , thin film , nanotechnology , deposition (geology) , chemistry , layer (electronics) , medicine , paleontology , sediment , biology , endocrinology
An on-chip compatible method to fabricate high energy density TiO2 thin film electrodes on 3D-structured silicon substrates was demonstrated. 3D-structured electrodes are fabricated by combining reactive ion etching (RIE) with low pressure chemical vapor deposition (LPCVD), enabling accurate control of the aspect ratio of substrates and the subsequent deposition of TiO2 thin film electrodes onto these structured substrates. The prepared 3D-TiO2 electrodes exhibit a current-dependent increase in storage capacity of a factor up to 16 as compared to conventional planar electrodes. In addition, these 3D electrodes also reveal excellent power and cycling performance. This work demonstrates that LPCVD is capable of depositing homogeneous film electrodes on highly structured substrates and the prepared 3D-electrodes also shows significant improve in storage capacity and power density
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