Stacked Layers of Different Porosity in 4H SiC Substrates Applying a Photoelectrochemical Approach | Zendy

Markus Leitgeb | Zendy; Christopher Zellner | Zendy; Christoph Hufnagl | Zendy; Michael Schneider | Zendy; Stefan Schwab | Zendy; Herbert Hutter | Zendy; U. Schmid | Zendy

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Stacked Layers of Different Porosity in 4H SiC Substrates Applying a Photoelectrochemical Approach

Author(s) -

Markus Leitgeb,

Christopher Zellner,

Christoph Hufnagl,

Michael Schneider,

Stefan Schwab,

Herbert Hutter,

U. Schmid

Publication year - 2017

Publication title -

journal of the electrochemical society

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.258

H-Index - 271

eISSN - 1945-7111

pISSN - 0013-4651

DOI - 10.1149/2.1081712jes

Subject(s) - porosity , materials science , hydrofluoric acid , etching (microfabrication) , monocrystalline silicon , electrochemistry , substrate (aquarium) , porous silicon , isotropic etching , composite material , voltage , homogeneity (statistics) , chemical engineering , optoelectronics , electrode , silicon , metallurgy , layer (electronics) , chemistry , oceanography , physics , quantum mechanics , mathematics , engineering , statistics , geology

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