Open AccessImproved Gas Sensing Performance of ALD AZO 3-D Coated ZnO Nanorods
Author(s) -
Pengtao Lin,
X. Chen,
K. Zhang,
Helmut Baumgart
Publication year - 2018
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0331811jss
Subject(s) - nanorod , materials science , atomic layer deposition , wafer , nanotechnology , thin film , hydrothermal circulation , layer (electronics) , optoelectronics , chemical engineering , engineering
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