Open AccessNanomechanical and Morphological Characterization of Tungsten Trioxide (WO3) Thin Films Grown by Atomic Layer Deposition
Author(s) -
M. A. Mamun,
K. Zhang,
Helmut Baumgart,
A.A. Elmustafa
Publication year - 2015
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0241509jss
Subject(s) - materials science , atomic layer deposition , amorphous solid , annealing (glass) , tungsten , crystallite , tungsten trioxide , nanocrystalline material , thin film , surface roughness , nanoindentation , analytical chemistry (journal) , composite material , metallurgy , nanotechnology , crystallography , chemistry , chromatography
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