Open AccessChemical Reaction Pathways for MOVPE Growth of Aluminum Nitride
Author(s) -
Yumi Inagaki,
Takahiro Kozawa
Publication year - 2015
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0231602jss
Subject(s) - materials science , nitride , metalorganic vapour phase epitaxy , aluminium , amide , epitaxy , adsorption , chemical reaction , chemical engineering , alkyl , methane , nanotechnology , chemistry , organic chemistry , metallurgy , layer (electronics) , engineering
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