Open AccessEu Activation inβ-Ga2O3MOVPE Thin Films by Ion Implantation
Author(s) -
M. Peres,
Emilio Nogales,
Bianchi Méndez,
K. Lorenz,
M. R. Correia,
T. Monteiro,
N. Ben Sédrine
Publication year - 2019
Publication title -
ecs journal of solid state science and technology
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0191907jss
Subject(s) - materials science , photoluminescence , metalorganic vapour phase epitaxy , annealing (glass) , rutherford backscattering spectrometry , cathodoluminescence , thin film , sapphire , analytical chemistry (journal) , ion implantation , fluence , epitaxy , optoelectronics , luminescence , ion , nanotechnology , optics , laser , metallurgy , chemistry , physics , organic chemistry , layer (electronics) , chromatography
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