Open AccessEffect of Retaining Ring Slot Designs, Conditioning Discs and Conditioning Schemes on the Slurry Bow Wave Width during Chemical Mechanical Planarization
Author(s) -
Leticia Vazquez Bengochea,
Yasa Sampurno,
Calliandra Stuffle,
Fransisca Sudargho,
Ruochen Han,
Ara Philipossian
Publication year - 2018
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0141805jss
Subject(s) - materials science , chemical mechanical planarization , slurry , conditioning , ring (chemistry) , polishing , optics , rotation (mathematics) , fast fourier transform , acoustics , composite material , geometry , physics , computer science , statistics , chemistry , mathematics , organic chemistry , algorithm
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