Open AccessSlurry Supply Mechanism Utilizing Capillary Effect in Chemical Mechanical Planarization
Author(s) -
Takashi Fujita,
Junji Watanabe
Publication year - 2019
Publication title -
ecs journal of solid state science and technology
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0111905jss
Subject(s) - slurry , materials science , chemical mechanical planarization , capillary action , polishing , mechanism (biology) , composite material , nozzle , mechanical engineering , philosophy , epistemology , engineering
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