Open AccessChemical Vapor Deposition of Lithium Phosphate Thin-Films for 3D All-Solid-State Li-Ion Batteries
Author(s) -
Jie Xie,
Jos Oudenhoven,
Peter Paul R. M. L. Harks,
Dongjiang Li,
Peter H. L. Notten
Publication year - 2014
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/2.0091503jes
Subject(s) - thin film , chemical vapor deposition , metalorganic vapour phase epitaxy , lithium (medication) , materials science , deposition (geology) , ionic bonding , chemical engineering , carbon film , crystallization , inorganic chemistry , combustion chemical vapor deposition , ion , chemistry , nanotechnology , epitaxy , organic chemistry , layer (electronics) , biology , medicine , paleontology , endocrinology , sediment , engineering
High quality Lithium phosphate (Li3PO4) thin films have been deposited by metal-organic chemical vapor deposition (MOCVD), using tert-butyllithium and trimethyl phosphate as precursors. The Li3PO4 films deposited at 300°C yielded the highest ionic conductivity (3.9 × 10−8 S·cm−1). Increasing the deposition temperature led to crystallization of the deposited films and, consequently, to lower ionic conductivities. Kinetic studies on planar substrates showed that Li3PO4 deposition is a diffusion-controlled process in the temperature range of 300 to 500°C. Li3PO4 films have also been deposited on highly structured substrates to investigate, for the first time, the feasibility of 3D deposition of Li3PO4 by MOCVD. Furthermore, very thin films of Li3PO4 have been deposited onto thin film Si anodes and it was found that these layers effectively suppress the SEI formation and dramatically improve the cycle performance of Si film anodes
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