Open AccessLow-Temperature Atomic Layer Deposition of Cobalt Oxide Thin Films Using Dicobalt Hexacarbonyl tert-Butylacetylene and Ozone
Author(s) -
Bing Han,
Kyu Ha Choi,
K Park,
Woo-Sung Han,
WonJun Lee
Publication year - 2011
Publication title -
electrochemical and solid-state letters
Language(s) - English
Resource type - Journals
eISSN - 1944-8775
pISSN - 1099-0062
DOI - 10.1149/2.008202esl
Subject(s) - atomic layer deposition , ozone , materials science , cobalt , deposition (geology) , oxide , layer (electronics) , thin film , thermal decomposition , impurity , saturation (graph theory) , inorganic chemistry , analytical chemistry (journal) , metallurgy , chemistry , nanotechnology , environmental chemistry , organic chemistry , paleontology , sediment , biology , mathematics , combinatorics
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