Open AccessCommunication—The Role of the Metal-Semiconductor Junction in Pt-Assisted Photochemical Etching of Silicon Carbide
Author(s) -
Markus Leitgeb,
Andreas Backes,
Christopher Zellner,
Michael Schneider,
U. Schmid
Publication year - 2015
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0021603jss
Subject(s) - materials science , silicon carbide , etching (microfabrication) , metal , semiconductor , silicon , carbide , optoelectronics , p–n junction , nanotechnology , photochemistry , metallurgy , chemistry , layer (electronics)
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