Open AccessReview—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications
Author(s) -
Alain E. Kaloyeros,
F.A. Jove,
Jonathan Goff,
Barry Arkles
Publication year - 2017
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0011710jss
Subject(s) - materials science , silicon nitride , nitride , silicon , nanotechnology , engineering physics , locos , thin film , focus (optics) , optoelectronics , layer (electronics) , optics , engineering , physics
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