Open AccessRF Sputtered Low-Resistivity and High-Transmittance Indium Gallium Zinc Oxide Films for Near-UV Applications
Author(s) -
Heng-Jui Chang,
Kuo-Ming Huang,
ShangFu Chen,
Tze-Hsuan Huang,
MengChyi Wu
Publication year - 2010
Publication title -
electrochemical and solid-state letters
Language(s) - English
Resource type - Journals
eISSN - 1944-8775
pISSN - 1099-0062
DOI - 10.1149/1.3529877
Subject(s) - materials science , indium , gallium , transmittance , substrate (aquarium) , amorphous solid , zinc , electrical resistivity and conductivity , sputtering , optoelectronics , sputter deposition , thin film , metallurgy , nanotechnology , crystallography , chemistry , engineering , electrical engineering , oceanography , geology
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