Open AccessFormation of Submicrometer Pore Arrays by Electrochemical Etching of Silicon and Nanoimprint Lithography
Author(s) -
Guillaume Laffite,
Marilyne Roumanie,
C. Gourgon,
Corinne Perret,
J. Boussey,
P. Kleimann
Publication year - 2010
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.3514584
Subject(s) - materials science , silicon , wafer , hydrofluoric acid , etching (microfabrication) , nanoimprint lithography , nanotechnology , lithography , optoelectronics , fabrication , metallurgy , medicine , alternative medicine , layer (electronics) , pathology
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