Open AccessComparison of Lateral Non-uniformity Phenomena between HfO2 and SiO2 from Magnified C-V Curves in Inversion Region
Author(s) -
Jen-Yuan Cheng,
Chiao-Ti Huang,
Hui-Ting Lu,
JennGwo Hwu
Publication year - 2009
Publication title -
ecs transactions
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.235
H-Index - 52
eISSN - 1938-6737
pISSN - 1938-5862
DOI - 10.1149/1.3206631
Subject(s) - inversion (geology) , materials science , oxide , silicon , depletion region , optoelectronics , geology , semiconductor , structural basin , paleontology , metallurgy
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