Open AccessOrganic Oxidants for Chemical Mechanical Planarization
Author(s) -
Francis M. de Rege,
Pengxiang Yang,
Steven Grumbine,
Jason Aggio,
Roger I. Martin,
V. Brusić
Publication year - 2008
Publication title -
electrochemical and solid-state letters
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1944-8775
pISSN - 1099-0062
DOI - 10.1149/1.3012263
Subject(s) - chemical mechanical planarization , dissolution , iodine , copper , slurry , electrochemistry , solubility , mass spectrometry , precipitation , materials science , redox , molecule , chemical reaction , inorganic chemistry , polishing , chemistry , organic chemistry , electrode , chromatography , metallurgy , physics , meteorology , composite material
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