Open AccessSectioning of Sputtered Tantalum Films by Anodic Oxide Growth in Fluoride Solutions
Author(s) -
P. S. Wilcox
Publication year - 1971
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2407825
Subject(s) - anodizing , tantalum , materials science , oxide , electrolyte , anode , voltage , analytical chemistry (journal) , metallurgy , chemistry , aluminium , electrode , electrical engineering , chromatography , engineering
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