Open AccessMiniaturized Amperometric Solid Electrolyte Carbon Dioxide Sensors
Author(s) -
Gary W. Hunter,
Jennifer Xu,
C. C. Liu,
B. Ward,
Dorothy Lukco,
M. Artale,
P. Lampard,
D. Androjna,
Joseph Hammond
Publication year - 2006
Publication title -
ecs transactions
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.235
H-Index - 52
eISSN - 1938-6737
pISSN - 1938-5862
DOI - 10.1149/1.2357260
Subject(s) - electrolyte , carbon dioxide sensor , materials science , amperometry , microfabrication , fast ion conductor , electrode , electrochemistry , fabrication , analytical chemistry (journal) , electrochemical gas sensor , chemical engineering , carbon dioxide , chemistry , chromatography , medicine , alternative medicine , organic chemistry , pathology , engineering
A miniaturized electrochemical carbon dioxide (CO2) sensor using Na3Z r2Si2PO12 (NASICON) as a solid electrolyte has been fabricated and de monstrated. Microfabrication techniques were used for sensor fabricat ion to yield a sensing area around 1.0 mm x 1.1 mm. The NASICON solid electrolyte and the Na2CO3/BaCO3 (1:1.7 molar ratio) auxiliary elect rolyte were deposited by sputtering in between and on top of the inte rdigitated finger-shaped platinum electrodes. This structure maximize s the length of the three-phase boundary (electrode, solid electrolyt e, and auxiliary electrolyte), which is critical for gas sensing. The robust CO2 sensor operated up to 600 C in an amperometric mode and a ttempts were made to optimize sensor operating parameters. Concentrat ions of CO2 between 0.02% and 4% were detected and the overall sensor performance was evaluated. Linear response of sensor current output to ln[CO2 concentration] ranging from 0.02% to 1% was achieved.
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