Open AccessDepth Profiling of Chemical and Electronic Structures and Defects of Ultrathin HfSiON on Si(100)
Author(s) -
Seiichi Miyazaki,
Akio Ohta,
Seiji Inumiya,
Yasuo Nara,
Keisaku Yamada
Publication year - 2006
Publication title -
ecs transactions
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.235
H-Index - 52
eISSN - 1938-6737
pISSN - 1938-5862
DOI - 10.1149/1.2355709
Subject(s) - x ray photoelectron spectroscopy , chemical state , annealing (glass) , nitrogen , oxide , oxygen , analytical chemistry (journal) , materials science , chemical bond , yield (engineering) , chemistry , chemical engineering , metallurgy , organic chemistry , chromatography , engineering
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