Open AccessA New Approach to Lattice Damage Gettering
Author(s) -
Charles Pearce,
V. J. Zaleckas
Publication year - 1979
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2129298
Subject(s) - getter , wafer , common emitter , materials science , impurity , silicon , fabrication , lattice (music) , optoelectronics , metal , wafer fabrication , metallurgy , chemistry , medicine , alternative medicine , physics , organic chemistry , pathology , acoustics
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